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Joint Institute for Laboratory Astrophysics (JILA)

Maskless Laser Writer

equipmentfabrication / machiningIndustry: Aerospace
Category
Physical Infrastructure
Affiliations
JILA

Description

Picomaster maskless laser writer in the JILA Keck Lab for direct-write photolithography, currently fitted with a 375 nm optical module and supporting backside alignment from GDS files; usage is charged on a tiered rate schedule.

Official page

https://jila-kecklab.colorado.edu/index.html

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Access

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Contact

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Details

Keywords
photolithography, picomaster, gds layout files, backside alignment, klayout
Location
Boulder, Colorado
Key spec
375 nm optical module
Equipment class
Maskless laser lithography writer
Associated entity
JILA Keck Lab | Home
Specifications
The new rate schedule for the maskless laser writer is 0-5 hrs 100% charge, 5-10 hrs 60% charge and >10 hrs is 30% charge.