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Joint Institute for Laboratory Astrophysics (JILA)

sputter chambers

equipmentfabrication / machiningIndustry: Aerospace
Category
Physical Infrastructure
Affiliations
JILA

Description

Two sputter chambers in the JILA Keck Lab for coating metals and dielectrics, with a published sputtering target list; staff can help source targets or do e-beam or thermal evaporative coatings instead.

Official page

https://jila-kecklab.colorado.edu/index.html

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Details

Keywords
sputter coating, dielectric coatings, sputtering targets, metal coatings, thermal evaporation
Location
Boulder, Colorado
Key spec
Two chambers; metals and dielectrics
Equipment class
Sputter deposition system
Associated entity
JILA Keck Lab | Home