Joint Institute for Laboratory Astrophysics (JILA)
JILA Micro and Nanofabrication Facility
facilityfabrication / cleanroom / shopIndustry: Aerospace
- Category
- Physical Infrastructure
- Affiliations
- JILA
Description
JILA Micro and Nanofabrication Facility: a suite of Class 1000 (ISO 6) and Class 100 (ISO 5) cleanrooms for micro and nano fabrication, with optical microscopes, PVD, spin and sputter coating systems, scanning electron microscopes and a tube furnace.
Official page
https://www.colorado.edu/jila/jila-research/support-technical-facilities
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Access
- Access summary
- book
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Contact
- Contact
- (no name)
Details
- Keywords
- nanofabrication, cleanroom suite, sputter coating, scanning electron microscopes, tube furnace, spin coating
- Location
- Boulder, Colorado
- Cleanliness class
- ISO 6 (Class 1000); ISO 5 (Class 100)
- Associated entity
- Support & Technical Facilities | JILA | University of Colorado Boulder